reticles

Reticles
Reticles
Reticles
Parameters of spinning AM reticles.
Image-Velocity Sensing with Parallel-Slit Reticles*
Pattern displacement measurements for Si stencil reticles
Investigation of self-aligned phase-shifting reticles by simulation techniques
Investigation of self-aligned phase-shifting reticles by simulation techniques
Method for repairing Mo/Si multilayer thin film phase defects in reticles for extreme ultraviolet lithography
Developing a viable multilayer coating process for extreme ultraviolet lithography reticles
Investigation of smart inspection of critical layer reticles using additional designer data to determine defect significance
Reduced-stress, electrostatically chuckable reticles for use in extreme ultraviolet and soft X-ray microlithography apparatus and me...
The Application of Deep UV Phase Shifted-Single Layer Halftone Reticles to 256 Mbit Dynamic Random Access Memory Cell Patterns